IBM – Burlington Tool Hook-Up

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Clean Room & Tools

Liebert Engineering worked with IBM to retrofit, upgrade and re-arrange hundreds of silicon wafer manufacturing, inspection, testing and finishing tools used throughout the facility.

Hook-ups range from relocation of existing tools to support wafer flow improvements to first-of-kind tool installs that represent state of the art technology improvements. Typical scope involves close coordination with Tool Owner, facilities, and business area representatives to develop tool move-in, setting, and utility hook-up packages.

Hook-ups range from basic mechanical and electrical installations to complex tool suites utilizing several utilities, HVAC, drains, gas cabinets, hazardous and combustible fluids, multiple controls systems, etc. These fast paced projects reward planning and implementation detail with minimal Owner downtime where profitability relies on product throughput.


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